Thickness regulation of the mechanical properties and failure control of Ti/TiN and Ti(N)/TiN bilayer stacks
| Autor: | Si, Biao, Ren, Yi, Wang, Ding, Sun, Linfan, Zhou, Yanwen, Zhang, Kaice, Su, Zhiwei, Zhao, Zhuo |
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| Zdroj: | In Thin Solid Films 30 January 2024 789 |
| Databáze: | ScienceDirect |
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