Study of oxidation behaviour of Ruthenium thin film after thermal annealing in oxygen environment
| Autor: | Gupta, Shruti, Sinha, Mangalika, Dhawan, R., Jangir, R., Bose, A., Gupta, P., Swami, M.K., Modi, Mohammed H |
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| Zdroj: | In Thin Solid Films 1 January 2023 764 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect