Moisture diffusion in plasma-enhanced chemical vapor deposition dielectrics characterized with three techniques under clean room conditions
| Autor: | Cartailler, Vivien, Imbert, Grégory, Rochat, Névine, Chaton, Catherine, Vo-Thanh, Du, Benoit, Daniel, Duchamp, Geneviève, Frémont, Hélène |
|---|---|
| Zdroj: | In Thin Solid Films 31 March 2020 698 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect