Reducing the nano-scale defect formation of atomic-layer-deposited SrTiO3 films by adjusting the cooling rate of the crystallization annealing of the seed layer
| Autor: | Lee, Woongkyu, Yoo, Sijung, Jeon, Woojin, Yoo, Yeon Woo, An, Cheol Hyun, Chung, Min Jung, Kim, Han Joon, Lee, Sang Woon, Hwang, Cheol Seong |
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| Zdroj: | In Thin Solid Films 31 August 2015 589:723-729 |
| Databáze: | ScienceDirect |
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