A critical comparison between XRD and FIB residual stress measurement techniques in thin films

Autor: Bemporad, E., Brisotto, M., Depero, L.E., Gelfi, M., Korsunsky, A.M., Lunt, A.J.G., Sebastiani, M.
Zdroj: In Thin Solid Films 1 December 2014 572:224-231
Databáze: ScienceDirect