A critical comparison between XRD and FIB residual stress measurement techniques in thin films
Autor: | Bemporad, E., Brisotto, M., Depero, L.E., Gelfi, M., Korsunsky, A.M., Lunt, A.J.G., Sebastiani, M. |
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Zdroj: | In Thin Solid Films 1 December 2014 572:224-231 |
Databáze: | ScienceDirect |
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