Microstructural characterisation of tungsten coatings deposited using plasma sputtering on Si substrates
| Autor: | Vassallo, E., Caniello, R., Canetti, M., Dellasega, D., Passoni, M. |
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| Zdroj: | In Thin Solid Films 2 May 2014 558:189-193 |
| Databáze: | ScienceDirect |
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