Upgrading the “Berg-model” for reactive sputtering processes
| Autor: | Berg, S., Särhammar, E., Nyberg, T. |
|---|---|
| Zdroj: | In Thin Solid Films 28 August 2014 565:186-192 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Berg, S., Särhammar, E., Nyberg, T. |
|---|---|
| Zdroj: | In Thin Solid Films 28 August 2014 565:186-192 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect