Femtosecond laser-induced removal of silicon nitride layers from doped and textured silicon wafers used in photovoltaics

Autor: Bonse, J., Mann, G., Krüger, J., Marcinkowski, M., Eberstein, M.
Zdroj: In Thin Solid Films 2 September 2013 542:420-425
Databáze: ScienceDirect
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