CexAlyOz/TiN stack analysis for Metal–Insulator–Metal applications: Effect of annealing and the metal electrode deposition method
| Autor: | Kaynak, C. Baristiran, Lukosius, M., Tillack, B., Wenger, Ch., Abrutis, A., Skapas, M. |
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| Zdroj: | In Thin Solid Films 1 May 2012 520(14):4518-4522 |
| Databáze: | ScienceDirect |
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