Correlation between surface damage and micro-defects in Si covered with insulating layer by implantation of He and H ions
| Autor: | Liu, C.L., Li, M.K., Wang, Z., Gao, Y.J., Liao, J.Q., Zhang, D.C., Zhang, X.L., Shen, Y.Y. |
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| Zdroj: | In Thin Solid Films 2011 519(10):3162-3168 |
| Databáze: | ScienceDirect |
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