Thermal stability of undoped polycrystalline silicon layers on antimony and boron-doped substrates
| Autor: | Lysáček, D., Válek, L., Spousta, J., Šikola, T., Špetík, R. |
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| Zdroj: | In Thin Solid Films 2010 518(14):4052-4057 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect