Nanocrystallinity in RuO 2 coatings—Influence of precursor and preparation temperature

Autor: Malmgren, Christine, Eriksson, Annika K., Cornell, Ann, Bäckström, Joakim, Eriksson, Sten, Olin, Håkan
Zdroj: In Thin Solid Films 2010 518(14):3615-3618
Databáze: ScienceDirect