TiAlN film preparation by Y-shape filtered-arc-deposition system
| Autor: | Mashiki, Takayuki, Hikosaka, Hiroki, Tanoue, Hideto, Takikawa, Hirofumi, Hasegawa, Yushi, Taki, Makoto, Kumagai, Masao, Kamiya, Masao |
|---|---|
| Zdroj: | In Thin Solid Films 2008 516(19):6650-6654 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect