Deposition of thick cubic boron nitride films — Mechanisms and concepts
| Autor: | Kulisch, Wilhelm, Freudenstein, Regine |
|---|---|
| Zdroj: | In Thin Solid Films 2007 516(2):216-222 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Kulisch, Wilhelm, Freudenstein, Regine |
|---|---|
| Zdroj: | In Thin Solid Films 2007 516(2):216-222 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect