Deposition of Ti thin film using the magnetron sputtering method
| Autor: | Jung, Min J. *, Nam, Kyung H., Shaginyan, Leonid R., Han, Jeon G. |
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| Zdroj: | In Thin Solid Films 2003 435(1):145-149 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Jung, Min J. *, Nam, Kyung H., Shaginyan, Leonid R., Han, Jeon G. |
|---|---|
| Zdroj: | In Thin Solid Films 2003 435(1):145-149 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect