Effects of heat treatment on structure of amorphous CN x thin films by pulsed laser deposition
| Autor: | Aoi, Yoshifumi *, Ono, Kojiro, Sakurada, Kunio, Kamijo, Eiji, Sasaki, Muneo, Sakayama, Kunihiko |
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| Zdroj: | In Thin Solid Films 2001 389(1):62-67 |
| Databáze: | ScienceDirect |
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