Gamma and proton irradiation effects and thermal stability of electrical characteristics of metal-oxide-silicon capacitors with atomic layer deposited Al2O3 dielectric
Autor: | Rafí, J.M., Pellegrini, G., Fadeyev, V., Galloway, Z., Sadrozinski, H.F.-W., Christophersen, M., Phlips, B.F., Lynn, D., Kierstead, J., Hoeferkamp, M., Gorelov, I., Palni, P., Wang, R., Seidel, S. |
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Zdroj: | In Solid State Electronics February 2016 116:38-45 |
Databáze: | ScienceDirect |
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