Influence of sputtering pressure on morphological, mechanical and electrical properties of Al-doped ZnO films
| Autor: | Kar, J.P., Kim, S., Shin, B., Park, K.I., Ahn, K.J., Lee, W., Cho, J.H., Myoung, J.M. |
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| Zdroj: | In Solid State Electronics 2010 54(11):1447-1450 |
| Databáze: | ScienceDirect |
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