Fabrication of Silicon on Diamond (SOD) substrates by either the Bonded and Etched-back SOI (BESOI) or the Smart-Cut™ technology
| Autor: | Widiez, J., Rabarot, M., Saada, S., Mazellier, J.-P., Dechamp, J., Delaye, V., Roussin, J.-C., Andrieu, F., Faynot, O., Deleonibus, S., Bergonzo, P., Clavelier, L. |
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| Zdroj: | In Solid State Electronics February 2010 54(2):158-163 |
| Databáze: | ScienceDirect |
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