Optical emission diagnostics of etching of low- k dielectrics in a two frequency inductively coupled plasma
| Autor: | Miyauchi, M., Miyoshi, Y., Petrović, Z.Lj., Makabe, T. |
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| Zdroj: | In Solid State Electronics 2007 51(10):1418-1424 |
| Databáze: | ScienceDirect |
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