Uniaxially strained silicon by wafer bonding and layer transfer

Autor: Himcinschi, C., Radu, I., Muster, F., Singh, R., Reiche, M., Petzold, M., Gösele, U., Christiansen, S.H.
Zdroj: In Solid State Electronics 2007 51(2):226-230
Databáze: ScienceDirect