Physical thickness and group refractive index measurement of individual layers for double-stacked microstructures using spectral-domain interferometry

Autor: Park, Jungjae, Bae, Jaeseok, Kim, Jong-Ahn, Jin, Jonghan
Zdroj: In Optics Communications 15 January 2019 431:181-186
Databáze: ScienceDirect
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