Top-down, multi-scale numerical simulation of MEMS microphones under guided free fall tests
| Autor: | Faraci, David, Ghisi, Aldo, Adorno, Silvia, Corigliano, Alberto |
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| Zdroj: | In Microelectronics Reliability June 2021 121 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect