Reliability of platinum electrodes and heating elements on SiO2 insulation layers and membranes
| Autor: | Rusanov, R. a, ⁎, Rank, H. a, Graf, J. a, Fuchs, T. a, Mueller-Fiedler, R. a, Kraft, O. b |
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| Zdroj: | In Microelectronics Reliability August-September 2015 55(9-10):1920-1925 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect