FTIR spectroscopy for the hermeticity assessment of micro-cavities
| Autor: | Veyrié, D., Lellouchi, D., Roux, J.L., Pressecq, F., Tetelin, A., Pellet, C. |
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| Zdroj: | In Microelectronics Reliability 2005 45(9):1764-1769 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Veyrié, D., Lellouchi, D., Roux, J.L., Pressecq, F., Tetelin, A., Pellet, C. |
|---|---|
| Zdroj: | In Microelectronics Reliability 2005 45(9):1764-1769 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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Full Text from ScienceDirect