Energetic particle fluxes in magnetron sputter deposition of a-Si:H
| Autor: | Myers, Alan M., Doyle, James R., Feng, G. Jeff, Maley, Nagi, Ruzic, David L., Abelson, John R. |
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| Zdroj: | In Journal of Non-Crystalline Solids 1991 137 Part 2:783-786 |
| Databáze: | ScienceDirect |
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