Effect of barium contamination on gate oxide integrity in high-k dram
| Autor: | Boubekeur, H., Mikolajick, T., Bauer, A., Frey, L., Ryssel, H. |
|---|---|
| Zdroj: | In Journal of Non-Crystalline Solids May 2002 303(1):12-16 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
| Autor: | Boubekeur, H., Mikolajick, T., Bauer, A., Frey, L., Ryssel, H. |
|---|---|
| Zdroj: | In Journal of Non-Crystalline Solids May 2002 303(1):12-16 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect