Novel hydrofluorocarbon polymers for use as pellicles in 157 nm semiconductor photolithography: fundamentals of transparency
| Autor: | French, Roger H, Wheland, Robert C, Qiu, Weiming, Lemon, M.F, Zhang, Edward, Gordon, Joseph, Petrov, Viacheslav A, Cherstkov, Victor F, Delaygina, Nina I |
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| Zdroj: | In Journal of Fluorine Chemistry 2003 122(1):63-80 |
| Databáze: | ScienceDirect |
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