SiC epitaxial layer growth in a novel multi-wafer vapor-phase epitaxial (VPE) reactor
| Autor: | Burk, A.A., Jr. *, O'Loughlin, M.J., Nordby, H.D., Jr. |
|---|---|
| Zdroj: | In Journal of Crystal Growth 1999 200(3):458-466 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Burk, A.A., Jr. *, O'Loughlin, M.J., Nordby, H.D., Jr. |
|---|---|
| Zdroj: | In Journal of Crystal Growth 1999 200(3):458-466 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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