The optimal threading dislocation density of AlN template for micrometer-thick Al0.63Ga0.37N heteroepitaxy
| Autor: | Huang, Chia-Yen, Hagedorn, Sylvia, Walde, Sebastian, Tsai, Chia-Lung, Fu, Yi-Keng, Weyers, Markus |
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| Zdroj: | In Journal of Crystal Growth 15 December 2022 600 |
| Databáze: | ScienceDirect |
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