Simulation of diamond synthesis by microwave plasma chemical vapor deposition with multiple substrates in a substrate holder

Autor: Li, Lin, Zhao, Chengchun, Zhang, Shulong, Gong, Qiaorui, Sun, Xiaohui, Qian, Min, Hang, Yin
Zdroj: In Journal of Crystal Growth 1 February 2022 579
Databáze: ScienceDirect