Quantitative evaluation of strain relaxation in annealed sputter-deposited AlN film
| Autor: | Tanaka, Shuichi, Shojiki, Kanako, Uesugi, Kenjiro, Hayashi, Yusuke, Miyake, Hideto |
|---|---|
| Zdroj: | In Journal of Crystal Growth 15 April 2019 512:16-19 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect