Annealing behavior and electrical properties of atomic layer deposited PbTiO3 and PZT films
| Autor: | Yang, Jung In, Welsh, Aaron, Sbrockey, Nick M., Tompa, Gary S., Polcawich, Ronald G., Potrepka, Daniel M., Trolier-McKinstry, Susan |
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| Zdroj: | In Journal of Crystal Growth 1 July 2018 493:45-50 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect