Local strained silicon platform based on differential SiGe/Si epitaxy
| Autor: | Karmous, A., Oehme, M., Werner, J., Kirfel, O., Kasper, E., Schulze, J. |
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| Zdroj: | In Journal of Crystal Growth 2011 324(1):154-156 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Karmous, A., Oehme, M., Werner, J., Kirfel, O., Kasper, E., Schulze, J. |
|---|---|
| Zdroj: | In Journal of Crystal Growth 2011 324(1):154-156 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect