InGaAs composition monitoring for production MBE by in situ optical-based flux monitor (OFM)
Autor: | Pinsukanjana, Paul R. *, Marquis, Jeremy M., Hubbard, Jared, Trivedi, Mehul A., Dickey, Roger F., Tsai, Jerry M.-S., Kuo, Sam P., Kao, Philip S., Kao, Yung-Chung |
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Zdroj: | In Journal of Crystal Growth 2003 251(1):124-129 |
Databáze: | ScienceDirect |
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