InGaAs composition monitoring for production MBE by in situ optical-based flux monitor (OFM)

Autor: Pinsukanjana, Paul R. *, Marquis, Jeremy M., Hubbard, Jared, Trivedi, Mehul A., Dickey, Roger F., Tsai, Jerry M.-S., Kuo, Sam P., Kao, Philip S., Kao, Yung-Chung
Zdroj: In Journal of Crystal Growth 2003 251(1):124-129
Databáze: ScienceDirect