Influence of the three dimensionality of the HF electromagnetic field on resistivity variations in Si single crystals during FZ growth

Autor: Ratnieks, G, Muiznieks, A, Buligins, L, Raming, G, Mühlbauer, A *, Lüdge, A, Riemann, H
Zdroj: In Journal of Crystal Growth 15 June 2000 216(1-4):204-219
Databáze: ScienceDirect