Influence of the three dimensionality of the HF electromagnetic field on resistivity variations in Si single crystals during FZ growth
Autor: | Ratnieks, G, Muiznieks, A, Buligins, L, Raming, G, Mühlbauer, A *, Lüdge, A, Riemann, H |
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Zdroj: | In Journal of Crystal Growth 15 June 2000 216(1-4):204-219 |
Databáze: | ScienceDirect |
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