Applications of Hadamard transform-gas chromatography/mass spectrometry for the detection of hexamethyldisiloxane in a wafer cleanroom
| Autor: | Cheng, Yuan-Kai a, Lin, Cheng-Huang a, ⁎, Kuo, Samuel b, Yang, Jonathan b, Hsiung, Szu-Yuan c, Wang, Jia-Lin c |
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| Zdroj: | In Journal of Chromatography A 2012 1220:143-146 |
| Databáze: | ScienceDirect |
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