Structural design and active disturbance rejection control of rigid-flexible coupling motion stage for nanopositioning
| Autor: | Yang, Zhijun, Huang, Ruirui, Chen, Sen, Su, Liyun, Li, Ruiqi |
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| Zdroj: | In Journal of the Franklin Institute February 2023 360(3):2133-2158 |
| Databáze: | ScienceDirect |
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