Investigation of reaction mechanisms in the chemical vapor deposition of al from DMEAA
| Autor: | Psarellis, George M., Aviziotis, Ioannis G., Duguet, Thomas, Vahlas, Constantin, Koronaki, Eleni D., Boudouvis, Andreas G. |
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| Zdroj: | In Chemical Engineering Science 23 February 2018 177:464-470 |
| Databáze: | ScienceDirect |
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