Super resolution optical measurements of nanodefects on Si wafer surface using infrared standing evanescent wave
| Autor: | Takahashi, S., Kudo, R., Usuki, S., Takamasu, K. |
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| Zdroj: | In CIRP Annals - Manufacturing Technology 2011 60(1):523-526 |
| Databáze: | ScienceDirect |
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