Magnetic field-assisted finishing for micropore X-ray focusing mirrors fabricated by deep reactive ion etching
| Autor: | Yamaguchi, H., Riveros, R.E., Mitsuishi, I., Takagi, U., Ezoe, Y., Yamasaki, N., Mitsuda, K., Hashimoto, F. |
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| Zdroj: | In CIRP Annals - Manufacturing Technology 2010 59(1):351-354 |
| Databáze: | ScienceDirect |
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