Hybrid polishing mechanism of single crystal SiC using mixed abrasive slurry (MAS)

Autor: Lee, H.S., Kim, D.I., An, J.H., Lee, H.J., Kim, K.H., Jeong, H.
Zdroj: In CIRP Annals - Manufacturing Technology 2010 59(1):333-336
Databáze: ScienceDirect
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