A fast and low-cost microfabrication approach for six types of thermoplastic substrates with reduced feature size and minimized bulges using sacrificial layer assisted laser engraving

Autor: Gu, Longjun, Yu, Guodong, Li, Cheuk-Wing
Zdroj: In Analytica Chimica Acta 2 January 2018 997:24-34
Databáze: ScienceDirect