Effect of RTCVD growth conditions on the crystal quality of pseudomorphic Si1−x −yGexCy films
| Autor: | Mi, Jian, Warren, Patricia, Letourneau, Pascal, Judelewicz, Moshe, Gailhanou, Marc, Dutoit, Michel |
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| Zdroj: | In Selected Topics in Group IV and II–VI Semiconductors 1996:190-194 |
| Databáze: | ScienceDirect |
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