6 - Multiscale modeling of chemical mechanical planarization (CMP)
| Autor: | Fan, W., Boning, D. |
|---|---|
| Zdroj: | In Advances in Chemical Mechanical Planarization (CMP) 2016:137-167 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Fan, W., Boning, D. |
|---|---|
| Zdroj: | In Advances in Chemical Mechanical Planarization (CMP) 2016:137-167 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|