Resonating microbridge mass flow sensor with low-temperature glass-bonded cap wafer
| Autor: | Legtenberg, Rob, Bouwstra, Siebe, Fluitman, Jan H.J. |
|---|---|
| Zdroj: | In Sensors & Actuators: A. Physical 1991 27(1):723-727 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Legtenberg, Rob, Bouwstra, Siebe, Fluitman, Jan H.J. |
|---|---|
| Zdroj: | In Sensors & Actuators: A. Physical 1991 27(1):723-727 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|