Hydrogenated amorphous silicon films deposited by DC planar magnetron reactive sputtering
| Autor: | Pinarbasi, Mustafa, Chou, Lih Hsin, Maley, Nagi, Myers, Alan, Leet, David, Thornton, John A. |
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| Zdroj: | In Superlattices and Microstructures 1987 3(4):331-340 |
| Databáze: | ScienceDirect |
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