Determination of multilayer thicknesses of GaAs/AlAs superlattice by grazing incidence X-ray reflectivity
| Autor: | Ren L.L., Gao H.F., Gao S.T., Liu J.J., Zhang W. |
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| Jazyk: | angličtina |
| Rok vydání: | 2013 |
| Předmět: | |
| Zdroj: | International Journal of Metrology and Quality Engineering, Vol 4, Iss 2, Pp 81-86 (2013) |
| Druh dokumentu: | article |
| ISSN: | 2107-6839 2107-6847 |
| DOI: | 10.1051/ijmqe/2013040 |
| Popis: | The grazing incidence X-ray reflectivity is used to determine the multilayer thickness of GaAs/AlAs supperlattice. The measurement process includes the fitting model and the measurement conditions (different powers of 45 kV × 40 mA, 40 kV × 40 mA and 35 kV × 40 mA, different step sizes of 0.005°, 0.008° and 0.010°, and different times per step of 1 s, 2 s, 3 s). In order to obtain the valid measurement process, the combined standard deviation is used as the normal of the fitting results selection. As a result, the measurement condition of 0.008° step size and 2 s time per step with the power 40 kV × 40 mA is selectable with the operation stability of facilities and smaller error. |
| Databáze: | Directory of Open Access Journals |
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