Analysis of Temperature and Drain Voltage Dependence of Substrate Current in Deep Submicrometer MOSFET'S

Autor: Y. Amhouche, A. El Abbassi, K. Raïs, R. Rmaily
Jazyk: angličtina
Rok vydání: 2001
Předmět:
Zdroj: Active and Passive Electronic Components, Vol 24, Iss 3, Pp 201-209 (2001)
Druh dokumentu: article
ISSN: 0882-7516
1563-5031
DOI: 10.1155/2001/65128
Popis: In this paper, a detailed experimental study of channel length, drain voltage and temperature dependence of substrate current Isub in submicrometer MOSFET's is presented. Impact ionization rate α is remarkably increased with decreasing channel length L and go up from 10-7 to 6, 7 ⋅ 10−7 when L decrease from 2 to 0.1 μm, this behaviour found expression in a fast increase of the substrate current maximum Isubmax⁡. Moreover it is observed that contrarily of long channels, low temperature operation is favourable to reduce hot carrier effects in submicrometer MOSFET's and may represent a promising alternative for the improvement of the performances of Si integrated circuits.
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