| Autor: |
Maxim V. Shandrikov, Alexander A. Cherkasov, Efim M. Oks, Alexey V. Vizir |
| Jazyk: |
angličtina |
| Rok vydání: |
2022 |
| Předmět: |
|
| Zdroj: |
AIP Advances, Vol 12, Iss 2, Pp 025017-025017-6 (2022) |
| Druh dokumentu: |
article |
| ISSN: |
2158-3226 |
| DOI: |
10.1063/5.0081234 |
| Popis: |
We describe the use of a modified residual gas analyzer based on a quadrupole mass spectrometer to measure the ion mass-to-charge composition of the plasma of a repetitively pulsed planar magnetron discharge. The pulse duration and frequency parameters necessary to ensure reliable plasma ion composition data are determined. Examples of measurements of the ion mass-to-charge spectra are given. |
| Databáze: |
Directory of Open Access Journals |
| Externí odkaz: |
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